Flip-chip type semiconductor device, production process for manufacturing such flip-chip type semiconductor device, and production process for manufacturing electronic product using such flip-chip type semiconductor device

ABSTRACT

A flip-chip type semiconductor device includes a semiconductor substrate. A plurality of electrode terminals are provided and arranged on a top surface of the semiconductor substrate, a sealing resin layer is formed on the top surface of the semiconductor substrate such that the electrode terminals are completely covered with the sealing resin layer.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a flip chip type semiconductor device,which is used for manufacturing an electoronic product, such as acompact semicoonductor package, a motherboard or the like. Also, thepresent invention relates to a production process for manufacturing sucha flip-chip type semiconductor device. Further, the present inventionrelates to a production process for manufacturing an electronic product,such as a compact semiconductor package, a motherboard or the like,using the flip-chip type semiconductor device.

2. Description of the Related Art

In a representative conventional production method for manufacturingflip-chip type semiconductor devices, for example, a silicon wafer isprepared, and a surface of the silicon wafer is sectioned into aplurality of semiconductor chip areas by forming grid-like fine grooves(i.e. scribe lines) in the silicon wafer. Then, the silicon wafer isprocessed by various well-known methods such that each of thesemiconductor chip areas is produced as a semiconductor chip or device.Subsequently, a plurality of conductive pads are formed and arranged oneach of the semiconductor devices, and respective metal bumps may bebonded on the conductive pads, if necessary. Each of the metal bumps maybe formed o solder or gold, and serves as an electrode terminal or lead.Thereafter, the silicon wafer is subjected to a dicing process in whichthe silicon wafer is cut along the grid-like grooves defining thesemiconductor devices, so that the semiconductor devices are separatedfrom each other.

The flip-chip type semiconductor device has been developed to meet thedemands of higher performance, smaller and lighter size, and higherspeed for a piece of electronic equipment. For example, the flip-chiptype semiconductor device may be used to manufacture a compactsemiconductor package, such as such as a BGA (ball grid array) typesemiconductor package, a chip-on-chip type semiconductor package or thelike.

In production of the BGA type semiconductor package, a wiring-board,usually called a package board or interposer, is prepared. The wiringboard or interposer has a plurality of conductive pads arranged on a topsurface thereof, and there is a mirror image relationship between thearrangement of the conductive pads of the interposer and the arrangementof the metal bumps of the flip-chip type semiconductor device. Theinterposer also has a plurality of conductive pads arranged on a bottomsurface thereof, and a plurality of solder balls bonded to theconductive pads, with the solder balls forming the ball grid array(BGA). The flip-chip type semiconductor device is flipped over andmounted on the top surface of the interposer such that the metal bumpsof the flip-chip type semiconductor device are bonded to the conductivepads on the top surface of the interposer to thereby establishelectrical connections therebetween.

In production of the chip-on-chip semiconductor package, a semiconductordevice, featuring a larger size than that of the flip-chip typesemiconductor device, is prepared. The larger semiconductor device has aplurality of conductive pads arranged on a top surface thereof, andthere is a mirror image relationship between the arrangement of theconductive pads of the larger semiconductor device and the arrangementof the metal bumps of the flip-chip type semiconductor device. Theflip-chip type semiconductor device is flipped over and mounted on thetop surface of the larger semiconductor device such that the metal bumpsof the flip-chip type semiconductor device are bonded to the conductivepads of the larger semiconductor device to thereby establish electricalconnections therebetween.

Further, the flip-chip type semiconductor device may be directly mountedon a motherboard for a piece of electronic equipment, such that therespective metal bumps of the flip-chip type semiconductor device arecontacted with and bonded to conductive pads formed and arranged on themotherboard.

In any case, after the mounting of the flip-chip type semiconductordevice, a resin-underfilling process must be carried out such that thespace between the flip-chip type semiconductor device and theinterposer, semiconductor device or motherboard is filled with asuitable resin, to thereby seal the arrangements of the metal bumps andconductive pads.

Conventionally, various resin-underfilling processes have been proposed,but it is very difficult to efficiently carry out the conventionalresin-underfilling processes, as discussed in detail hereinafter,resulting in decline in productivity of the electronic products usingthe flip-chip type semiconductor devices. Also, in a recent tendencytoward further miniaturizing the flip-chip type semiconductor devices,it is substantially impossible to efficiently carry out the conventionalresin-underfilling processes.

SUMMARY OF THE INVENTION

Therefore, a main object of the present invention is to provide aflip-chip type semiconductor device which is constituted such that aresin-underfilling process can be substantially omitted after a mountingof the flip-chip type semiconductor device, resulting in an increase inproductivity of electronic products using the flip-chip typesemiconductor device.

Another object of the present invention is provide a production processfor manufacturing such a flip-chip type semiconductor device.

Yet another object of the present invention is to provide a productionprocess for manufacturing an electronic product, such as a chip-on-chipsemiconductor package, a ball gate array semiconductor package, amotherboard or the like, including such a flip-chip type semiconductordevice.

In accordance with a first aspect of the present invention, there isprovided a flip-chip type semiconductor device comprising: asemiconductor substrate; a plurality of electrode terminals provided andarranged on a top surface of the semiconductor substrate; and a sealingresin layer formed on the top surface of the semiconductor substratesuch that the electrode terminals are completely covered with thesealing resin layer.

The flip-chip type semiconductor device may further comprise aprotective layer formed on the top surface of the semiconductorsubstrate such that the electrode terminals are exposed to an outside,with the protective layer being completely covered with the sealingresin layer.

In the flip-chip type semiconductor device, each of the electrodeterminals may be formed as a conductive pad formed on the top surface ofthe semiconductor substrate. Alternatively, each of the electrodeterminals may further include a metal bump bonded on the conductive pad.Preferably, the metal bump is formed as a stud-like metal bump.

Also, preferably, the sealing resin layer contains a filler comprising aplurality of solid particles, which may be electrically conductive.

In accordance with a second aspect of the present invention, there isprovided a production process comprising the steps of: preparing asemiconductor wafer having a plurality of semiconductor devices producedin a top surface thereof, each of the semiconductor devices having aplurality of electrode terminals provided and arranged on a top surfacethereof; forming a sealing resin layer on the top surface of thesemiconductor wafer such that the electrode pads are completely coveredwith the sealing resin layer; and dicing the semiconductor wafer suchthat the semiconductor devices are divided into a plurality ofindividually-separated semiconductor devices.

In this production process, the semiconductor wafer may include aprotective layer formed on the top surface thereof such that theelectrode terminals are exposed to the outside, and the protective layeris completely covered with the sealing resin layer.

Also, each of the electrode terminals may be formed as a conductive padformed on the top surface of each of the semiconductor devices.Alternatively, each of the electrode terminals may further include ametal bump bonded on the conductive pad. Preferably, the metal bump isformed as a stud-like metal bump.

In the production process according to the present invention, theformation of the sealing resin layer may be carried out by the steps of:putting an liquid resin material on the top surface of the semiconductorwafer; and spinning the semiconductor wafer such that the liquid resinmaterial is spread out over the top surface of the semiconductor wafer,resulting in the formation of the sealing resin layer.

Alternatively, the formation of the sealing resin layer may be carriedout by the steps of: preparing an adhesive resin sheet; and laminatingthe adhesive resin sheet on the top surface of the semiconductor wafer,resulting in the formation of the sealing resin layer. The adhesivesheet may have a dicing resin sheet laminated on a surface thereof. Inthis case, the lamination of the adhesive sheet on the top surface ofthe semiconductor wafer may be performed by facing down and applying thesemiconductor wafer to another surface of the adhesive sheet opposed tothe dicing sheet thereof.

The production process according to the present invention may furthercomprise the steps of: preparing a substrate having a plurality ofelectrode terminals provided and arranged a top surface thereof, thearrangement of the electrode terminals of the substrate has a mirrorimage relationship with respect to the arrangement of the electrodeterminals of each of the individually-separated semiconductor devices;and mounting one of the individually-separated semiconductor devices onthe substrate such that the electrode terminals of the substratepenetrate into the sealing resin layer of the individually-separatedsemiconductor device, and are bonded to the respective electrodeterminals thereof.

In this production process, each of the electrode terminals of thesubstrate may comprise a conductive pad formed on the top surfacethereof, and a sprout-like metal bump bonded thereon, and each of theelectrode terminals of the individually-separated semiconductor devicemay comprise a conductive pad formed on the top surface thereof. In thiscase, the mounting of the individually-separated semiconductor device onthe substrate may comprise the steps of: flipping over and positioningthe individually-separated semiconductor device above the substrate suchthat the respective conductive pads of the individually-separatedsemiconductor device are aligned with the sprout-like bumps of thesubstrate; and pressing the individually-separated semiconductor deviceagainst the substrate, resulting in the penetration of the sprout-likebumps of the substrate into the sealing resin layer and the bonding ofthe sprout-like bumps of the substrate to the conductive pads of theindividually-separated semiconductor device.

Alternatively, each of the electrode terminals of the substrate maycomprise a conductive pad formed on the top surface thereof, and astud-like metal bump bonded thereon, and each of the electrode terminalsof the individually-separated semiconductor device may comprise aconductive pad formed on the top surface thereof, and a stud-like metalbump bonded thereon. In this case, the mounting of theindividually-separated semiconductor device on the substrate maycomprise the steps of: flipping over and positioning theindividually-separated semiconductor device above the substrate suchthat the respective stud-like metal bumps of the individually-separatedsemiconductor device are aligned with the stud-like metal bumps of thesubstrate; and pressing the individually-separated semiconductor deviceagainst the substrate, resulting in the penetration of the stud-likebumps of the substrate into the sealing resin layer and the bonding ofthe stud-like bumps of the substrate to the stud-like bumps of theindividually-separated semiconductor device. Also, the sealing resinlayer may contain a filler comprising a plurality of solid particles. Inthis case, a part of the solid particles is pinched and left in thebonding faces between the stud-like metal bumps of theindividually-separated semiconductor device and the stud-like metalbumps of the substrate.

In the production process according to the present invention, thesubstrate may comprise another semiconductor device, resulting in aproduction of a chip-on-chip semiconductor device. Also, the substratemay comprise an electronic interposer for producing an electronicproduct. Further, the substrate may comprise a wiring board forproducing a piece of electronic equipment.

In the production process according to the present invention, when theaforesaid semiconductor wafer is defined as a first semiconductor wafer,the production process further may further comprise the steps of:preparing a second semiconductor wafer having a plurality ofsemiconductor devices produced in a top surface thereof, each of thesemiconductor devices having a plurality of electrode terminals providedand arranged on a top surface thereof, the arrangement of the electrodeterminals of each of the semiconductor devices of the secondsemiconductor wafer has a mirror image relationship with respect to thearrangement of the electrode terminals of each of theindividually-separated semiconductor devices; mounting the respectiveindividually-separated semiconductor devices on the semiconductordevices of the second semiconductor wafer such that the electrodeterminals of each of the semiconductor devices of the secondsemiconductor wafer penetrate into the sealing resin layer, and arebonded to respective electrode terminals of a correspondingindividually-separated semiconductor device, resulting in production ofa plurality of chip-on-chip semiconductor assemblies; and dicing thesecond semiconductor wafer such that the chip-on-chip semiconductorassemblies are separated from each other.

In accordance with a third aspect of the present invention, there isprovided a semiconductor wafer having a plurality of semiconductordevices produced therein, which comprises: a plurality of electrodeterminals provided and arranged on a top surface of each of thesemiconductor devices; and a sealing resin layer formed on all the topsurfaces of the semiconductor devices such that the electrode terminalsare completely covered with the sealing resin layer.

In accordance with a fourth aspect of the present invention, there isprovided a production process comprising the steps of: preparing asemiconductor wafer having a plurality of semiconductor devices producedtherein, each of the semiconductor devices having plurality of electrodeterminals provided and arranged on a top surface thereof; forming asealing resin layer on the semiconductor wafer such that all theelectrode terminals are completely covered with the sealing resin layer.

BRIEF DESCRIPTION OF THE DRAWINGS

The above objects and other objects will be more clearly understood fromthe description set forth below, with reference to the accompanyingdrawings, wherein:

FIG. 1A is a sectional view showing a first representative step of aconventional production process for manufacturing a chip-on-chipsemiconductor package;

FIG. 1B is a sectional view showing a second representative step of theconventional production process;

FIG. 1C is a sectional view showing a third representative step of theconventional production process;

FIG. 1D is a sectional view showing a fourth representative step of theconventional production process;

FIG. 2A is a sectional view showing a first representative step ofanother conventional production process for manufacturing a chip-on-chipsemiconductor package;

FIG. 2B is a sectional view showing a second representative step of theother conventional production process;

FIG. 2C is a sectional view showing a third representative step of theother conventional production process;

FIG. 2D is a sectional view showing a fourth representative step of theother conventional production process;

FIG. 3A is a perspective view of a silicon wafer, for explaining a firstrepresentative step of a first embodiment of a production process formanufacturing flip-chip type semiconductor devices according to thepresent invention;

FIG. 3B is a partially-enlarged sectional view of the silicon wafershown in FIG. 3A;

FIG. 3C is a perspective view of the silicon wafer, on which an uncuredliquid resin material is put, for explaining a second representativestep of the first embodiment of the production process for manufacturingthe flip-chip type semiconductor devices according to the presentinvention;

FIG. 3D is a perspective view of the silicon wafer, which is subjectedto a spin-coat process, for explaining a second representative step ofthe first embodiment of the production process for manufacturing theflip-chip type semiconductor devices according to the present invention;

FIG. 3E is a partially-enlarged sectional view of the silicon wafershown in FIG. 3D;

FIG. 3F is a perspective view of the silicon wafer, which is mounted ona dicing resin sheet, for explaining a third representative step of thefirst embodiment of the production process for manufacturing theflip-chip type semiconductor devices according to the present invention;

FIG. 3G is a partially-enlarged sectional view of the silicon wafershown in FIG. 3F;

FIG. 3H is a partially-enlarged sectional view, similar to FIG. 3G,showing the silicon wafer subjected to a dicing process;

FIG. 4A is a perspective view showing an adhesive resin sheet, forexplaining a representative step of a modification of the productionprocess shown in FIGS. 3A to 3H;

FIG. 4B is a perspective view showing the silicon wafer having theadhesive resin sheet placed thereon, for explaining anotherrepresentative step of the modification of the production process shownin FIGS. 3A to 3H;

FIG. 4C is a partially enlarged sectional view of the silicon wafershown in FIG. 4B;

FIG. 5A is a sectional view of a first semiconductor device mounted on asubstrate, for explaining a first representative step of a productionprocess for manufacturing a chip-on-chip semiconductor package, usingthe flip-chip type semiconductor device according to the presentinvention;

FIG. 5B is a sectional view of a second semiconductor device produced asthe flip-chip type semiconductor device according to the presentinvention, for explaining a second representative step of the productionprocess for manufacturing the chip-on-chip semiconductor package;

FIG. 5C is a sectional view of the first and second semiconductordevices aligned with each other, for explaining a third representativestep of the production process for manufacturing the chip-on-chipsemiconductor package;

FIG. 5D is a sectional view of an assembly of the first and secondsemiconductor devices, for explaining a fourth representative step ofthe production process for manufacturing the chip-on-chip semiconductorpackage;

FIG. 6 is a sectional view of a BGA (ball grid array) type semiconductorpackage using the flip-chip type semiconductor device according to thepresent invention;

FIG. 7 is a sectional view of a motherboard on which the flip-typesemiconductor device according to the present invention is directlymounted;

FIG. 8A is a partial sectional view of a silicon wafer, for explaining afirst representative step of a second embodiment of a production processfor manufacturing flip-chip type semiconductor devices according to thepresent invention;

FIG. 8B is a partial sectional view of the silicon wafer, on which asealing resin layer is formed, for explaining a second representativestep of the second embodiment of the production process formanufacturing the flip-chip type semiconductor devices according to thepresent invention;

FIG. 8C is a partial sectional view of the silicon wafer, which ismounted on a dicing resin sheet, for explaining a third representativestep of the second embodiment of the production process formanufacturing the flip-chip type semiconductor devices according to thepresent invention;

FIG. 8D is a partial sectional view, similar to FIG. 8C, showing thesilicon wafer subjected to a dicing process;

FIG. 9A is a sectional view of a first semiconductor device mounted on asubstrate, for explaining a first representative step of anotherproduction process for manufacturing a chip-on-chip semiconductorpackage, using the flip-chip type semiconductor manufactured by thesecond embodiment of the production process according to the presentinvention;

FIG. 9B is a sectional view of a second semiconductor device produced asthe flip-chip type semiconductor device manufactured by the secondembodiment of the production process according to the present invention,for explaining a second representative step of the production processfor manufacturing the chip-on-chip semiconductor package;

FIG. 9C is a sectional view of the first and second semiconductordevices aligned with each other, for explaining a third representativestep of the production process for manufacturing the chip-on-chipsemiconductor package;

FIG. 9D is a sectional view of an assembly of the first and secondsemiconductor devices, for explaining a fourth representative step ofthe production process for manufacturing the chip-on-chip semiconductorpackage;

FIG. 10A is an enlarged sectional view of a modification of theflip-chip type semiconductor device manufactured by the secondembodiment of the production process according to the present invention;

FIG. 10B is an enlarged sectional view of a chip-on-chip semiconductordevice using the modification of the flip-chip type semiconductor deviceshown in FIG. 10A;

FIG. 11A is a partial sectional view of a silicon wafer, for explaininga first representative step of a third embodiment of a productionprocess for manufacturing flip-chip type semiconductor devices accordingto the present invention;

FIG. 11B is a partial sectional view of a dicing resin sheet, on which asealing resin layer is laminated, for explaining a second representativestep of the third embodiment of the production process for manufacturingthe flip-chip type semiconductor devices according to the presentinvention;

FIG. 11C is a partial sectional view of the silicon wafer, which isfaced down and applied to the dicing resin sheet, for explaining a thirdrepresentative step of the third embodiment of the production processfor manufacturing the flip-chip type semiconductor devices according tothe present invention;

FIG. 11D is a partial sectional view, similar to FIG. 11C, showing thesilicon wafer subjected to a dicing process;

FIG. 12A is a schematic sectional view of a silicon wafer, forexplaining a first representative step of yet another production processfor manufacturing a chip-on-chip semiconductor package, using theflip-chip type semiconductor device-manufactured in accordance with thepresent invention;

FIG. 12B is a schematic sectional view of the silicon wafer on which theflip-chip type semiconductor devices are mounted thereon, for explaininga second representative step of the production process for manufacturingthe chip-on-chip semiconductor package; and

FIG. 12C is a schematic sectional view of the silicon wafer subjected toa dicing process, for explaining a third representative step of theproduction process for manufacturing the chip-on-chip semiconductorpackage.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Before descriptions of embodiments of the present invention, for betterunderstanding of the present invention, a conventional productionprocess for manufacturing a chip-on-chip semiconductor package will beexplained with reference to FIGS. 1A to ID.

In this conventional production process, as shown in FIG. 1A, a firstsemiconductor device 10F is prepared, and then is mounted on and adheredto a substrate 12, using a suitable adhesive agent 14. Although notillustrated, the first semiconductor device 10F has a plurality ofconductive pads provided on a top surface thereof, and respective metalbumps 16 bonded on the conductive pads which are arranged at a centralarea of the top surface thereof. Each of the conductive pads may beformed of a suitable metal material, such as aluminum, gold, copper orthe like. Also, each of the metal bumps 16 is formed as a sprout-likegold bump, which may be may be produced from a gold wire, using awell-know wire-bonding machine.

Note, in this example, although the substrate 12 is formed as a wiringboard or an interposer, it may comprise a mount stage included in ametal lead frame.

On the other hand, as shown in FIG. 1B, a flip-chip type semiconductordevice is prepared as a second semiconductor device 10S featuring asmaller size than that of the first semiconductor device 10F. Althoughnot illustrated, the second semiconductor device 10S has a plurality ofconductive pads provided on a top surface thereof. Note, the arrangementof the conductive pads of the second semiconductor device 10S has amirror image relationship with respect to the arrangement of thesprout-like metal bumps 16.

After the preparation of the first and second semiconductor devices 10Fand 10S, the second semiconductor device 10S is flipped over andpositioned above the first semiconductor device 10F such that therespective conductive pads of the second semiconductor device 10S arealigned with the sprout-like metal bumps 16 provided on the central areaof the top surface of the first semiconductor device 10F.

Then, as shown in FIG. 1C, the second semiconductor device 10S ispressed against the top surface of the first semiconductor device 10F,using either an ultrasonic-pressure bonding method or a heat-pressurebonding method, so that the respective conductive pads of the secondsemiconductor device 10S are abutted against and bonded to thesprout-like metal bumps 16 provided on the top surface of the firstsemiconductor device 10F.

Subsequently, as shown in FIG. 1D, a resin supply nozzle 17 is moved toa space between the first and second semiconductor devices 10F and 10S,and an uncured liquid resin material, indicated by reference URM, isintroduced from the resin supply nozzle 17 into the space by utilizingthe capillary phenomenon. Namely, the second semiconductor device 20S isunderfilled with the uncured liquid resin material URM so that thesprout-like metal bumps 16 are sealed together with the conductive padswith the liquid resin material URM. Then, the liquid resin material URMis completely hardened as a sealing resin layer 18 between the first andsecond semiconductor devices 10F and 10S.

Thereafter, each of the conductive pads, which are provided at theperipheral area of the top surface of the first semiconductor device10F, is electrically connected to a corresponding conductive pad,provided on the interposer 12, with a bonding wire. Then, the assemblyshown in FIG. 1D is resin-sealed, using a transfer molding method,resulting in production of the chip-on-chip semiconductor package.

In this conventional production method, an entrance location forintroducing the uncured liquid into the space between the first andsecond semiconductor devices 10F and 10S must be previously determinedat the peripheral area of the top surface of the first semiconductordevice 10F, and no conductive pads can be provided at the entrancelocation, resulting in restriction of a freedom of design of thechip-on-chip semiconductor device.

Also, when the flip-chip type semiconductor device is furtherminiaturized, it is very difficult or impossible to properly fill thespace between the first and second semiconductor devices 10F and 10Swith the uncured liquid resin material URM, because the space becomesnarrower due to the further miniaturization of the flip-chip typesemiconductor device.

With reference to FIGS. 2A to 2D, another conventional representativeproduction process for manufacturing a chip-on-chip semiconductorpackage is illustrated.

In this conventional production process, as shown in FIG. 2A, a firstsemiconductor device 20F is prepared, and then is mounted on and adheredto a substrate 22, using a suitable adhesive agent 24. Although notshown, the first semiconductor device 20F has a plurality of conductivepads provided on top surface thereof, and each of the conductive padsmay be formed of a suitable metal material, such as aluminum, gold,copper or the like. Although the substrate 22 is formed as a wiringboard or an interposer, it may comprise a mount stage included in ametal lead frame.

On the other hand, as shown in FIG. 2B, a flip-chip type semiconductordevice is prepared as a second semiconductor device 20S featuring asmaller size than that of the first semiconductor device 20F. The secondsemiconductor device 20S has a plurality of conductive pads (not shown)provided on a top surface thereof, and respective metal bumps 26 bondedon the conductive pads. As illustrated, similar to the above-mentionedbumps 16, each of the metal bumps 26 is formed as a sprout-like goldbump. Note, the arrangement of the sprout-like metal bumps 26 of thesecond semiconductor device 20S has a mirror image relationship withrespect to the arrangement of the conductive pads which is provided at acentral area of the top surface of the first semiconductor device 20F.

After the preparation of the first and second semiconductor devices 20Fand 20S, as shown in FIG. 2C, an uncured liquid resin material,indicated by reference URM, is put on the top surface of the firstsemiconductor device 20F, using a potting method. Then, the secondsemiconductor device 20S is flipped over and positioned above the firstsemiconductor device 20F such that the respective sprout-like metalbumps 26 are aligned with the conductive pads arranged at a central areaof the top surface of the first semiconductor device 20F.

Subsequently, as shown in FIG. 2D, the second semiconductor device 20Sis pressed against the top surface of the first semiconductor device20F, using either an ultrasonic-pressure bonding method or aheat-pressure bonding method, so that the respective sprout-like metalbumps 26 are abutted against and bonded to the conductive pads which areprovided at the central area of the top surface of the firstsemiconductor device 20F. At the same time, the sprout-like metal bumps26 are sealed together with the conductive pads with the uncured liquidresin material URM. Then, the liquid resin material URM is completelyhardened as a sealing resin layer 28 (FIG. 2D) between the first andsecond semiconductor devices 20F and 20S.

Thereafter, similar to the first-mentioned conventional productionprocess, each of the peripheral conductive pads, which are provided atthe peripheral area of the top surface of the first semiconductor device20F, is electrically connected to a corresponding conductive pad (notshown), provided on the interposer 22, with a bonding wire. Then, theassembly shown in FIG. 2D is resin-sealed, using a transfer moldingmethod, resulting in production of the chip-on-chip semiconductorpackage.

In this other conventional production method, it is very difficult toaccurately control an amount of the uncured liquid resin material URM tobe put on the top surface of the first semiconductor device 20F usingthe potting method.

If the amount of uncured liquid resin material URM put on the topsurface of the second semiconductor device 20S is too much, a part ofthe liquid resin material URM is swelled out of a space between thefirst and second semiconductor devices 20F and 20S, and thus theperipheral conductive pads on the first semiconductor device 20F may bepolluted with the swelled-out resin material. If a peripheral conductivepad on the first semiconductor device 10F is polluted with the resinmaterial, it is impossible to properly bond the bonding wire to thepolluted conductive pad. Also, if a thickness of the secondsemiconductor device 20S is too thin, a movable tool, which is used tocarry the second semiconductor device 10S, may be polluted with theswell-out resin material. Thus, it is difficult to decrease an entirethickness of the chip-on-chip semiconductor package.

On the other hand, if the amount of uncured liquid resin material URMput on the top surface of the second semiconductor device 10S is toosmall, voids or cavities may be produced in the sealing resin layer 18.

In the conventional production process shown in FIGS. 2A to 2D, it hasbeen proposed that, for example, a semi-cured sealing resin sheet issubstituted for the uncured liquid resin material URM. In particular,the sealing resin sheet is put on the top surface of the firstsemiconductor device 20F such that the conductive pads provided at thecentral area of the top surface thereof are covered with the sealingresin sheet. Subsequently, the second semiconductor device 20S ispressed against the sealing resin sheet such that the sprout-like metalbumps penetrate the sealing resin sheet, and is then bonded to theconductive pads on the first semiconductor 20F. Thereafter, thesemi-cured sealing resin sheet is completely hardened to thereby form asealing resin layer between the first and second semiconductor devices20F and 20S.

Since it is possible to accurately control a thickness of the sealingresin sheet, and therefore, an amount of resin material forming thesealing resin layer, apart of the sealing resin sheet can be preventedfrom being-swelled out of the space between the first and secondsemiconductor devices 20F and 20S. Nevertheless, it is difficult toexactly and precisely position the sealing resin sheet on the topsurface of the first semiconductor device 20F. In reality, thepositioning of the sealing resin layer involves an error on the order of500 microns.

JP-A-(HEI) 11-297750 discloses that a sealing resin layer is previouslyformed on a surface of a silicon wafer in which a plurality of flip-chiptype semiconductor devices are produced, with each of the devices havinga plurality of metal bumps provided thereon. The formation of thesealing resin layer is performed, using a transfer molding method, suchthat tip ends of the metal bumps are projected from the sealing resinlayer. Thereafter, the silicon wafer is subjected to a dicing process inwhich the flip-chip type semiconductor devices are separated from eachother. When each of the separated flip-chip type semiconductor device isflipped over and mounted on an interposer or another semiconductordevice, the sealing resin layer serves as an underfilling resin layerfor sealing the metal bumps and the conductive pads associatedtherewith.

In the production process disclosed in JP-A-(HEI) 11-297750, although itis possible to accurately control a thickness of the sealing resinlayer, the formation process of the sealing resin layer is troublesome,because a flexible resin sheet must be incorporated in a transfer molddie so that the tip ends of the metal bumps can be projected from thesealing resin layer. In particular, a tip end of each of the metal bumpsis penetrated into the flexible sheet, and a resin material to be moldedis introduced into a space between the top surface of silicon wafer andthe flexible resin sheet. In short, it cannot be said that theproduction process disclosed in JP-A-(HEI) 11-297750 is efficient.

Also, JP-A-(HEI) 11-274241 discloses that a sealing resin layer ispreviously formed on a surface of a silicon wafer in which a pluralityof flip-chip type semiconductor devices are produced, with each of thedevices having a plurality of metal bumps provided thereon. Theformation of the sealing resin layer is performed so that the metalbumps are completely buried in the sealing resin layer, and then thesealing resin layer is subjected to a polishing process such that themetal bumps are exposed to the outside. Thereafter, the silicon wafer issubjected to a dicing process in which the flip-chip type semiconductordevices are separated from each other. When each of the separatedflip-chip type semiconductor device is flipped over and mounted on aninterposer or another semiconductor device, the sealing resin layerserves as an underfilling resin layer for sealing the metal bumps andthe conductive pads associated therewith.

Also, it cannot be said the production process disclosed in JP-A-(HEI)11-274241 is efficient, because the polishing process is troublesome.

First Embodiment

With reference to FIG. 3A to 3H, a first embodiment of a productionprocess for manufacturing a plurality of flip-chip type semiconductordevices according to the present invention is explained below.

First, as shown in FIG. 3A, a silicon wafer 30 is prepared. A topsurface of the silicon wafer 30 is sectioned into a plurality ofsemiconductor chip areas 32 by forming grid-like fine grooves (i.e.scribe lines), which are represented by broken lines. The silicon wafer30 is already processed by various well-known methods so that each ofthe semiconductor chip areas 32 is produced as a semiconductor chip ordevice.

Also, as shown in FIG. 3B in which an extent of each of thesemiconductor devices is indicated by reference 32, a plurality ofelectrode terminals 34 are already provided and arranged on each of thesemiconductor devices 32, and each of the electrode terminals 34 isformed as a conductive pad. Further, a silicon dioxide layer 36 and apassivation layer 38 may be formed on the top surface of the siliconwafer 30 such that each of the electrode terminals or conductive pads 34is exposed to the outside. Both the silicon dioxide layer 36 and thepassivation layer 38 function as a protective layer. An organicprotective layer, such as a polyimide layer, may be substituted for boththe silicon dioxide layer 36 and the passivation layer 38.

Note, each of the conductive pads 34 is formed of a suitable metalmaterial, such as aluminum, gold, copper or the like. Also, note, inthis embodiment, the conductive pads 34 must be arranged at a givenpitch of 40 μm or more than 40 μm, for the reasons stated in detailhereinafter.

Then, the silicon wafer 30 is subjected to a spin-coat process, as shownFIGS. 3C and 3D. In particular, as shown in FIG. 3C, a given amount ofsuitable uncured liquid resin material, indicated by reference URM, isput on the top surface of the silicon wafer 30. Subsequently, thesilicon wafer 30 is spun as indicated by an arrow in FIG. 3C, and theuncured liquid resin material URM is spread out over the top surface ofsilicon wafer 30, due to the centrifugal forces acting on the uncuredliquid resin material, as indicated by radial arrows in FIG. 3D.Thereafter, the spread-out resin material URM is partially hardened to adegree at which the spread-out resin material URM cannot be fluidified.Thus, the partially-hardened resin material URM is formed as a sealingresin layer 40 on the top surface of the silicon wafer 30, such that theconductive pads 34 and the passivation layer 38 are completely coveredwith the sealing resin layer 40, as shown in FIGS. 3D and 3E.

After the formation of the sealing resin layer 40, as shown in FIGS. 3Fand 3G, a dicing resin sheet 42 having an adhesive layer 44 (FIG. 3G) isapplied and adhered to a bottom surface of the silicon wafer 30. Then,as shown in FIG. 3H, the silicon wafer 30 is subjected to a dicingprocess so as to be cut off along the grid-like grooves (not shown),with two cutting grooves being representatively indicated by reference46 in FIG. 3H. Namely, the silicon wafer 30 is divided into theplurality of flip-chip type semiconductor devices 32′, with each of thedivided sections of the silicon wafer 30 itself forming a semiconductorsubstrate 30′ for a corresponding flip-chip type semiconductor device32′.

The processed silicon wafer 30 or the divided semiconductor devices 32′may be shipped and circulated in an electronic market, to manufacturecompact semiconductor packages, such as such as BGA (ball grid array)type semiconductor packages, chip-on-chip type semiconductor packages orthe like.

In the spin-coat process, it is possible to accurately control athickness of the sealing resin layer 40, and therefore, an amount ofresin material forming the sealing resin layer 40.

With reference to FIGS. 4A, 4B and 4C, a modification of theabove-mentioned first embodiment of the production process according tothe present invention is explained next.

Note, in FIGS. 4A, 4B and 4C, the same references as in FIGS. 3A to 3Hrepresent the same features.

In this modification, as shown in FIG. 4A, an adhesive resin sheet ARSis prepared while preparing the silicon wafer 30. Then, as shown in FIG.4B, the adhesive resin sheet ARS is placed on the top surface of thesilicon wafer 30, and is subjected to a laminating process by using, forexample, a diaphragm type vacuum laminating machine, which is availablefrom MEIKI SEISHAKUSHO K.K. Thus, the adhesive resin sheet ARS is formedas a sealing resin layer 48 on the top surface of the silicon wafer 30,such that the electrode terminals or conductive pads 34 and thepassivation layer 38 are completely covered with the sealing resin layer48, as shown in FIG. 4C. Thereafter, the silicon wafer 30 having thesealing resin layer 48 is processed as explained with reference to FIGS.3F to 3H, resulting in production of the flip-chip type semiconductordevices (32′).

Similar to the above-mentioned first embodiment of the productionprocess according to the present invention, in this modification, it ispossible to accurately control a thickness of the adhesive resin sheetARS, and therefore, an amount of resin material forming the sealingresin layer 48.

For example, the flip-chip type semiconductor device 32′ according tothe present invention may be used to manufacture a chip-on-chipsemiconductor package.

With reference to FIGS. 5A to 5D, a production process for manufacturingthe chip-on-chip semiconductor package, using the flip-chip typesemiconductor device 32′ according to the present invention, isexplained next.

As shown in FIG. 5A, a first semiconductor device 50F is prepared, andthen is mounted on and adhered to a substrate 52, using a suitableadhesive agent 54. The first semiconductor device 5OF has a plurality ofconductive pads 55 provided on a top surface thereof, and each of theconductive pads 55 may be formed of a suitable metal material, such asaluminum, gold, copper or the like. Although not illustrated, a silicondioxide layer and a passivation layer may be formed on the top surfaceof the first semiconductor device 50F such that each of the conductivepads 55 is exposed to the outside. Also, an organic protective layer,such as a polyimide layer, may be substituted for both the silicondioxide layer and the passivation layer.

Note, in this embodiment, although the substrate 52 is formed as awiring board or an interposer, it may comprise a mount stage included ina metal lead frame.

As shown in FIG. 5A, the first semiconductor device 50F also has aplurality of metal bumps 56 bonded on the conductive pads 55 which arearranged at a central area of the top surface thereof. Preferably, eachof the metal bumps 56 is formed as a sprout-like gold bump, which may bemay be produced from a gold wire, using a well-know wire-bondingmachine.

In particular, as well known, the wire-bonding machine has a movablecapillary tube, through which a fine gold wire passes. A leading or freeend of the gold wire, which is protruded from a tip of the capillarytube, terminates at a fine small bead, by which a withdrawal of the goldwire into the capillary tube is prevented. Also, the capillary tube isprovided with a needle-like electrode, which is called a torch, and theneedle-like electrode is beside the tip of the capillary tube.

For the formation of a sprout-like bump 56, the movable capillary tubeis moved such that the small bead is pressed against a conductive pad 55while being subjected to ultrasonic vibration, and the small bead iswelded and bonded to the conductive pad 55 concerned, due to both theultrasonic vibration and the pressure. Then, while the capillary tube ismoved upward so as to draw the gold wire out of the capillary tube, ahigh voltage is applied to the needle-like electrode to produce a sparkbetween the drawn gold wire and the needle-like electrode.

Thus, the fine gold wire is cut off by the spark, resulting in aformation of a sprout-like bump 56. Namely, the bonded small bead isleft as the sprout-like bump 56 on the conductive pad 55 concerned. Onthe other hand, the cut-off end of the gold wire is fused due to thespark to thereby produce a fine small bead which is used for a nextformation of a sprout-like bump 56.

In short, in the first semiconductor device 50F, each of the sprout-likebumps 56 is associated with a corresponding conductive pad 55 to therebydefine an electrode terminal.

On the other hand, as shown in FIG. 5B, a flip-chip type semiconductordevice (32′), which is manufactured in accordance with the firstembodiment of the production process according to the present invention,is prepared as a second semiconductor device 50S featuring a smallersize than that of the first semiconductor device 50F. Note, in FIG. 5B,both a silicon dioxide layer 36 and a passivation layer 38 are omittedto avoid complexity of illustration. Also, note that the arrangement ofthe sprout-like metal bumps 56 of the first semiconductor device 50F hasa mirror image relationship with respect to the arrangement of theconductive pads 34 of the second semiconductor device 50S.

After the preparation of the first and second semiconductor devices 50Fand 50S, as shown in FIG. 5C, the second semiconductor device 50S isflipped over and positioned above the first semiconductor device 50Fsuch that the respective conductive pads 34 of the second semiconductordevice 50S are aligned with the sprout-like metal bumps 56 provided onthe central area of the top surface of the first semiconductor device50F.

Subsequently, as shown in FIG. 5D, the second semiconductor device 50Sis pressed against the top surface of the first semiconductor device50F, using either an ultrasonic-pressure bonding method or aheat-pressure bonding method, so that the respective conductive pads 34of the second semiconductor device 50S are abutted against and bonded tothe sprout-like metal bumps 56 provided on the central area of the topsurface of the first semiconductor device 50F. Namely, each of thesprout-like metal bumps 56 is penetrated into the sealing resin layer(40 or 48), and a tip end of the sprout-like metal bump 56 concerned issquashed on and bonded to a corresponding conductive pad 34. Then, thesealing resin layer (40 or 48) is completely hardened whereby thesprout-like metal bumps 56 are resin-sealed together with the conductivepads 34 and 55 associated therewith.

Thereafter, each of the conductive pads (not shown), which are providedat the peripheral area of the top surface of the first semiconductordevice 50F, is electrically connected to a corresponding conductive pad(not shown), provided on the interposer 52, with a bonding wire. Then,the assembly shown in FIG. 5D is resin-sealed, using a transfer moldingmethod, resulting in production of the chip-on-chip semiconductorpackage.

In the above-mentioned formation process of the sprout-like bumps 56, itis very difficult or impossible to arrange the sprout-like bumps 56 at apitch of smaller than 40 μm, and thus the conductive pads 34 of thesecond semiconductor device 50S must be arranged at the pitch of 40 μmor more than 40 μm, as stated above.

When the respective sprout-like metal bump 56 are bonded to theconductive pads 34, there may be a case where a very small part of theresin material forming the sealing resin layer (40 or 48) is lefttherebetween. However, if the resin material forming the sealing resinlayer (40 or 48) is selected so as to exhibit a viscosity of less than1,000 Pa·a at a bonding temperature for bonding the sprout-like metalbumps 56 to the conductive pads 34, it is possible to substantiallyremove the resin material from the bonding faces therebetween.

Before the second semiconductor device 20S can be accurately positionedabove the first semiconductor device 20F, a thickness of 35 μm should bepreferably given as a maximum thickness to the sealing resin layer (40or 48). In particular, the second semiconductor device 20S has apositioning mark covered with the sealing resin layer (40 or 48), andthe position of the second semiconductor device 20S to the firstsemiconductor device 20F is carried out by detecting the positioningmark with a positioning camera. Therefore, preferably, the sealing resinlayer (40 or 48) should have the thickness of smaller than 35 before thepositioning mark can be precisely detected by the positioning camera.

As shown in FIG. 6, the flip-chip type semiconductor device 32′according to the present invention may be used to manufacture a BGA(ball grid array) type semiconductor package.

In particular, in manufacturing the BGA type semiconductor package, apackage board or interposer 58 is prepared. The interposer 58 has aplurality of conductive pads 60 arranged on a top surface thereof, andrespective sprout-like metal bumps 62 formed on the conductive pads 60.Each of the sprout-like metal bumps 62 is produced in substantially thesame manner as mentioned above, and the arrangement of the sprout-likemetal bumps 62 has a mirror image relationship with respect to thearrangement of the conductive pads 34 of the flip-chip typesemiconductor device 32′. In short, each of the sprout-like bumps 62 isassociated with a corresponding conductive pad 66 to thereby define anelectrode terminal.

Also, the interposer 58 a plurality of conductive pads 64 arranged on abottom surface thereof, and respective solder balls 65 bonded to theconductive pads 64, with the solder balls 65 forming the ball grid array(BGA). The flip-chip type semiconductor device 32′ is mounted on theinterposer 58 in substantially the same manner as explained withreference to FIGS. 5C and 5D.

Further, as shown in FIG. 7, the flip-chip type semiconductor device 32′according to the present invention may be directly mounted on amotherboard 66.

In particular, the motherboard 66 has a plurality of conductive pads 67arranged on a top surface thereof, and respective sprout-like metalbumps 68 formed on the conductive pads 67. Each of the sprout-like metalbumps 68 is produced in substantially the same manner as mentionedabove, and the arrangement of the sprout shaped metal bumps 68 has amirror image relationship with respect to the arrangement of theconductive pads 34 of the flip-chip type semiconductor device 32′. Inshort, each of the sprout-like bumps 68 is associated with acorresponding conductive pad 67 to thereby define an electrode terminal.The flip-chip type semiconductor device 32′ is mounted on themotherboard 68 in substantially the same manner as explained withreference to FIGS. 5C and 5D.

As is apparent from the foregoing, in any case, by using a flip-chiptype semiconductor 32′ according to the present invention, it ispossible to carry out an underfilling process or resin-sealing processat the same time when the flip-chip type semiconductor device 32′ is onanother semiconductor device (50F), an interposer (58) or a motherboard(66). In other words, according to the present invention, it is possibleto substantially omit the underfilling process or resin-sealing processafter the mounting of the flip-chip type semiconductor device 32′.

Also, according to the present invention, since it is possible toaccurately control the amount of resin material forming the sealingresin layer 40, a swelling-out of the sealing resin layer (40 or 48) ora production of voids or cavities in the sealing resin layer (40 or 48)can be prevented, resulting in an increase in productivity of electronicproducts, such as chip-on-chip semiconductor packages, BGA typesemiconductor packages or motherboards.

Second Embodiment

With reference to FIGS. 8A to 8D, a second embodiment of a productionprocess for manufacturing a plurality of flip-chip type semiconductordevices according to the present invention is explained below.

First, as shown in FIG. 8A, a silicon wafer 70 is prepared. Similar tothe above-mentioned first embodiment, a top surface of the silicon wafer70 is sectioned into a plurality of semiconductor chip areas by forminggrid-like fine grooves (i.e. scribe lines). Note, in FIG. 8A, an extentof each of the semiconductor chip areas is indicated by reference 72.The silicon wafer 70 is already processed by various well-known methodsso that each of the semiconductor chip areas 72 is produced as asemiconductor chip or device.

Also, a plurality of conductive pads 73 are already provided andarranged on each of the semiconductor devices 72. Although notillustrated, a silicon dioxide layer and a passivation layer may beformed on the top surface of the silicon wafer 70 such that each of theconductive pads 73 is exposed to the outside. An organic protectivelayer, such as a polyimide layer may be substituted for both the silicondioxide layer and the passivation layer.

Note, each of the conductive pads 73 is formed of a suitable metalmaterial, such as aluminum, gold, copper or the like. Also, note that,in this embodiment, the conductive pads 73 may be arranged at a pitch of50 μm or smaller than 50 μm.

Further, as shown in FIG. 8A, a plurality of stud-like metal bumps 74are already formed on the respective conductive pads 73. Preferably, thestud-like metal bumps 74 are made from gold, but a suitable soldermaterial may be used for the stud-like metal bumps 74. The formation ofthe stud-like metal bumps 74 on the conductive pads 73 may be carriedout, using, for example, a photolithography process and anelectroplating process.

In short, in each of the semiconductor devices 72 each of the stud-likebumps 74 is associated with a corresponding conductive pad 73 to therebydefine an electrode terminal.

While preparing the silicon wafer 70, as shown in FIG. 8B, a sealingresin layer 75 is formed on the silicon wafer 70 in substantially thesame manner as the above-mentioned first embodiment. Namely, theformation of the sealing resin layer 75 may be carried out by either aspin-coat process as shown in FIGS. 3C, 3D and 3E or a laminatingprocess as shown in FIGS. 4A, 4B and 4C. In any event, the conductivepads 73 and the stud-like metal bumps 74 are completely covered with thesealing resin layer 75, as shown in FIG. 8B.

After the formation of the sealing resin layer 75, as shown in FIG. 8C,a dicing resin sheet 76 having an adhesive layer 77 is applied andadhered to a bottom surface of the silicon wafer 70. Then, as shown inFIG. 8D, the silicon wafer 70 is subjected to a dicing process so as tobe cut off along the grid-like grooves (not shown), with three cuttinggrooves being representatively indicated by reference 78 in FIG. 8D.Namely, the silicon wafer 70 is divided into the plurality of flip-chiptype semiconductor devices 72A, with each of the divided sections of thesilicon wafer 70 itself forming a semiconductor substrate 70′ for acorresponding flip-chip type semiconductor device 72A.

Similar to the above-mentioned silicon wafer 30or the dividedsemiconductor devices 32′, the processed silicon wafer 70 or the dividedsemiconductor devices 72A may be shipped and circulated in an electronicmarket, to manufacture compact semiconductor packages, such as such asBGA (ball grid array) type semiconductor packages, chip-on-chip typesemiconductor packages or the like.

With reference to FIGS. 9A to 9D, a production process for manufacturingthe chip-on-chip semiconductor package, using the flip-chip-typesemiconductor device 72A according to the present invention, is explainnext.

As shown in FIG. 9A, a first semiconductor device 80F is prepared, andthen is mounted on and adhered to a substrate 82, using a suitableadhesive agent 84. The first semiconductor device 80F has a plurality ofconductive pads 85 provided on a top surface thereof, and each of theconductive pads 85 may be formed of a suitable metal material, such asaluminum, gold, copper or the like. Although not illustrated, a silicondioxide layer and a passivation layer may be formed on the top surfaceof the first semiconductor device 80F such that each of the conductivepads 85 is exposed to the outside. An organic protective layer, such asa polyimide layer may be substituted for both the silicon dioxide layerand the passivation layer.

Note, in this embodiment, although the substrate 82 is formed as awiring board or an interposer, it may comprise a mount stage included ina metal lead frame.

As shown in FIG. 9A, the first semiconductor device 80F also has aplurality of stud-like metal bumps 86 formed on the conductive pads 85which are arranged at a central area of the top surface thereof. Similarto the above-mentioned stud-like metal bumps 74, preferably, thestud-like metal bumps 86 are made from gold, but a suitable soldermaterial may be used for the stud-like metal bumps 86. Also, theformation of the stud-like metal bumps 86 on the conductive pads 85 maybe carried out in substantially the same manner as the above-mentionedstud-like bumps 74.

In short, in the first semiconductor device 80F, each of the stud-likebumps 86 is associated with a corresponding conductive pad 85 to therebydefine an electrode terminal.

On the other hand, as shown in FIG. 9B, a flip-chip type semiconductordevice (72A), which is manufactured by the second embodiment of theproduction process according to the present invention, is prepared as asecond semiconductor device 80S featuring a smaller size than that ofthe first semiconductor device 80F. Note, the arrangement of thestud-like metal bumps 86 of the first semiconductor device 80F has amirror image relationship with respect to the arrangement of thestud-like metal bumps 74 of the second semiconductor device 80S.

After the preparation of the first and second semiconductor devices 80Fand 80S, as shown in FIG. 9C, the second semiconductor device 80S isflipped over and positioned above the first semiconductor device 80Fsuch that the respective stud-like metal bumps 74 of the secondsemiconductor device 80S are aligned with the stud-like metal bumps 86provided on the central area of the top surface of the firstsemiconductor device 80F.

Subsequently, as shown in FIG. 9D, the second semiconductor device 80Sis pressed against the top surface of the first semiconductor device80F, using either an ultrasonic-pressure bonding method or aheat-pressure bonding method, so that the respective stud-like metalbumps 74 of the second semiconductor device 80S are abutted against andbonded to the stud-like metal bumps 86 provided on the central area ofthe top surface of the first semiconductor device 80F. Namely, each ofthe stud-like metal bumps 86 is penetrated into the sealing resin layer75, and is then bonded to a corresponding stud-like metal bump 74. Then,the sealing resin layer 75 is completely hardened whereby the stud-likemetal bumps 74 and 76 are resin-sealed together with the conductive pads73 and 85 associated therewith.

Thereafter, each of the conductive pads (not shown), which are providedat the peripheral area of the top surface of the first semiconductordevice 80F, is electrically connected to a corresponding conductive pad(not shown), provided on the interposer 82, with a bonding wire. Then,the assembly shown in FIG. 9D is resin-sealed, using a transfer moldingmethod, resulting in production of the chip-on-chip semiconductorpackage.

Similar to the above-mentioned flip-chip type semiconductor device 32′,the flip-chip type semiconductor device 72A also may be used tomanufacture a BGA (ball grid array) type semiconductor package. Further,the flip-chip type semiconductor device 72A may be directly mounted on amotherboard.

Also, similar to the above-mentioned flip-chip type semiconductor device32′, by using a flip-chip type semiconductor device 72A according to thepresent invention, it is possible to carry out an underfilling processor resin-sealing process at the same time when the flip-chip typesemiconductor device 72A is mounted on another semiconductor device, aninterposer or a motherboard. In other words, according to the presentinvention, it is possible to substantially omit the underfilling processor resin-sealing process after the mounting of the flip-chip typesemiconductor device 72A.

Further, similar to the above-mentioned flip-chip type semiconductordevice 32′, since it is possible to accurately control the amount ofresin material forming the sealing resin layer 75, a swelling-out of thesealing resin layer 75 or a production of voids or cavities in thesealing resin layer 75 can be prevented, resulting in an increase inproductivity of electronic products, such as chip-on-chip semiconductorpackages, BGA type semiconductor packages or motherboards.

Similar to the above-mentioned first embodiment, in the secondembodiment, the resin material forming the sealing resin layer 75 shouldbe selected so as to exhibit a viscosity of less than 1,000 Pa·a at abonding temperature for bonding the stud-like metal bumps 74 to thestud-like metal bumps 86, so that the resin material forming the sealingresin layer 75 can be substantially removed from the bonding facestherebetween.

Also, similar to the above-mentioned first embodiment, a thickness of 35μm should be preferably given as a maximum thickness to the sealingresin layer 75, so that a positioning mark on the second semiconductor80S can be precisely detected by a positioning camera, which is used toposition the second semiconductor device 80S above the firstsemiconductor device 80F.

With respect to FIG. 10A, a modification of the flip-chip typesemiconductor device 72A, manufactured by the second embodiment of theproduction process according to the present invention, is illustrated.Note, in FIG. 10A, the modified flip-chip type semiconductor device isgenerally indicated by reference 72B, and the same references as inFIGS. 8A to 8D represent the same features.

In the modified flip-chip type semiconductor device 72B, a sealing resinlayer 75′, containing a filler comprising a plurality of conductivesolid particles 88 having an average diameter of smaller than 10 μm, issubstituted for the sealing resin layer 75. The sealing resin layer 75′may be obtained by laminating an anisotropic conductive film (ACF) onthe top surface of the silicon wafer 70. Note, the anisotropicconductive film is available from a market as a resin film containing aplurality of conductive solid particles. Also, the sealing resin layer75′ may be obtained by spin-coating the top surface of the silicon wafer70 with an uncured liquid resin material containing the conductivefiller (88).

As shown in FIG. 10B, the modified flip-chip type semiconductor device72B may be also used to manufacture a chip-on-chip semiconductorpackage. In particular, the chip-on-chip semiconductor package ismanufactured by mounting the modified flip-chip type semiconductordevice 72B as a second semiconductor device 80S on the firstsemiconductor device 10F shown in FIG. 9A, in substantially the samemanner as explained with respect to the FIGS. 9C and 9D.

As is apparent from FIG. 10B, when each of the stud-like bumps 74 of thesecond semiconductor device (80S or 72B) is pressed against and bondedto a corresponding stud-like bump 86 of the first semiconductor device80F, a small part of the filler or conductive solid particles 88 ispinched in the bonding face therebetween, so that the oxide skins ofboth the stud-like bumps 74 and 86 are broken by the pinched solidparticles 88, resulting in establishment of a good electrical connectionbetween both the stud-like bumps 74 and 86.

In this modified flip-chip type semiconductor device 72B, although thesealing resin layer 75′ contains the conductive filler (88), anonconductive filler, which is composed of ceramic particles or hardresin particles, may be substituted for the conductive filler (88).

Third Embodiment

With reference to FIGS. 11A to 11D, a third embodiment of a productionprocess for manufacturing a plurality of flip-chip type semiconductordevices according to the present invention is explained below.

First, as shown in FIG. 11A, a silicon wafer, which is identical to thatused in the above-mentioned second embodiment, is prepared. Note, inFIG. 11A, the same references as in FIG. 8A represent the same features.

While preparing the silicon wafer 70, as shown in FIG. 11B, a dicingresin sheet 90, having an adhesive resin sheet 92 laminated thereon, isprepared.

After the preparation of the silicon wafer 70 and the dicing resin sheet90 carrying the adhesive resin sheet 92, as shown in FIG. 11C, thesilicon wafer 70 is faced down and applied to the adhesive resin sheet92 of the dicing resin sheet 90, whereby the adhesive resin sheet 92 isformed as a sealing resin layer on the top surface of the silicon wafer70, such that the conductive pads 73 and the stud-like metal bumps 74are completely covered with the sealing resin layer 92, as shown in FIG.11C.

Thereafter, as shown in FIG. 11D, the silicon wafer 70 is subjected to adicing process so as to be cut off along the grid-like grooves (notshown), with three cutting grooves being representatively indicated byreference 94. Namely, the silicon wafer 70 is divided into the pluralityof flip-chip type semiconductor devices 72C, with each of the dividedsections of the silicon wafer 70 itself forming a semiconductorsubstrate 70′ for a corresponding flip-chip type semiconductor device72C.

Similar to the above-mentioned cases, the processed silicon wafer 70 orthe divided flip-chip type semiconductor devices 72C may be shipped andcirculated in an electronic market, to manufacture compact semiconductorpackages, such as such as BGA (ball grid array) type semiconductorpackages, chip-on-chip type semiconductor packages or the like.

In the third embodiment, since it is possible to accurately control athickness of the adhesive resin sheet or sealing resin layer 92, andtherefore, an amount of resin material forming the sealing resin layer92, a swelling-out of the sealing resin layer 92 or a production ofvoids or cavities in the sealing resin layer 92 can be prevented,resulting in an increase in productivity of electronic products, such aschip-on-chip semiconductor packages, BGA type semiconductor packages ormotherboards.

Also, in the third embodiment, the sealing resin layer 92 may contain afiller comprising a plurality of conductive or nonconductive particles,as explained with reference to FIG. 10A and 10B.

In the above-mentioned production processes in which a chip-on-chipsemiconductor package is manufactured, using a flip-chip typesemiconductor device according to the present invention, although theflip-chip type semiconductor device is mounted on another separatedsemiconductor device, it may be mounted on a semiconductor device whichis produced in a silicon wafer, as schematically illustrated in FIGS.12A, 12B and 12C.

In particular, in FIG. 12A, reference 96 indicates the flip-chip typesemiconductor devices, which are manufactured by either the secondembodiment or the third embodiment of the production process accordingto the present invention, and each of the semiconductor devices 96 has asealing resin layer 98 formed on a top surface thereof. Although notillustrated in FIG. 12A, of course, each of the semiconductor devices 96has a plurality of electrode terminals provided and arranged on the topsurface thereof. Each of these electrode terminals comprises aconductive pad formed on the top surface of each of the semiconductordevices, and a stud-like metal bump bonded on the conductive pad, andthe conductive pads and the stud-like metal bumps are covered with thesealing resin layer 98.

On the other hand, reference 100 indicates a silicon wafer having aplurality of semiconductor devices produced therein, and each of thesemiconductor devices has a plurality of electrode terminals, each ofwhich comprises a conductive pad (not shown) formed a top surface ofeach of the semiconductor device, and a stud-like metal bump 102 bondedon the conductive pad. Of course, the arrangement of the stud-like metalbumps 102 of each of the semiconductor devices on the silicon wafer 100has a mirror image relationship with respect to the arrangement of thestud-like metal bumps (not shown) of each of the flip-chip typesemiconductor devices 96.

As shown representatively shown in FIG. 12A, each of the flip-chip typesemiconductor devices 96 is flipped over and positioned above one of thesemiconductor devices on the silicon wafer 100, so that the stud-likemetal bumps of the flip-chip type semiconductor device 96 concerned isaligned with the stud-like metal bump of the corresponding semiconductordevice on the silicon wafer 100. Then, the flip-chip type semiconductor96 concerned is pressed against to the corresponding semiconductordevice, using either an ultrasonic-pressure bonding method or aheat-pressure bonding method, so that the stud-like metal bumps of theflip-chip type semiconductor device 96 are bonded to the respectivestud-like metal bumps 102 of the corresponding semiconductor device,resulting in production of a plurality of chip-on-chip semiconductorassemblies on the silicon wafer 100.

After the flip-chip type semiconductor devices 96 are mounted on all thesemiconductor devices on the silicon wafer 100, i.e. after theproduction of the chip-on-chip assemblies is completed on the siliconwafer 100, as shown in FIG. 12B, a dicing resin sheet 104 is adhered toa bottom surface of the silicon wafer 100, using a suitable adhesiveagent. Then, as shown in FIG. 12C, the silicon wafer 100 is subjected toa dicing process is subjected to a dicing process so as to be cut offalong the grid-like grooves (not shown), with three cutting groovesbeing representatively indicated by reference 106 in FIG. 12C. Namely,the chip-on-chip assemblies are separated from each other. Thereafter,each of the separated chip-on-chip assemblies is resin-sealed, using atransfer molding method, resulting in production of the chip-on-chipsemiconductor package.

Especially, when a flip-chip type semiconductor device according to thepresent invention features a relatively small size, i.e. when theconductive pads of the flip-chip semiconductor device are arranged atthe pitch of smaller than 50 μm, the production process for thechip-on-chip semiconductor package, as shown in FIGS. 12A, 12B and 12C,is preferable in that the flip-chip type semiconductor device can bemore easily positioned in parallel with a top surface of a silicon wafer(100) in comparison with the case where the flip-chip type semiconductordevice is positioned in parallel with a top surface of a separatedsemiconductor device, as shown in, for example, FIG. 9C.

Of course, the production process for the chip-on-chip semiconductorpackage, as shown in FIGS. 12A, 12B and 12C, is applicable to productionof a chip-on-chip semiconductor device using a flip-chip typesemiconductor device (32′) featuring a relatively large size, as shownin FIG. 5B, in which the conductive pads are arranged at the pitch of 40μm or more than 40 μm.

Finally, it will be understood by those skilled in the art that theforegoing description is of preferred embodiments of the devices andprocesses, and that various changes and modifications may be made to thepresent invention without departing from the spirit and scope thereof.

1-26 (cancelled)
 27. A semiconductor device comprising: a semiconductorsubstrate; a plurality of electrode terminals provided and arranged on atop surface of said semiconductor substrate; and a sealing resin layerformed on the top surface of said semiconductor substrate such that saidelectrode terminals are completely covered with said sealing resinlayer.
 28. A semiconductor device as set forth in claim 27, furthercomprising a protective layer formed on the top surface of saidsemiconductor substrate such that said electrode terminals are exposedto an outside, with said protective layer being completely covered withsaid sealing resin layer.
 29. A semiconductor device as set forth inclaim 27, wherein each of said electrode terminals comprises aconductive pad formed on the top surface of said semiconductorsubstrate.
 30. A semiconductor device as set forth in claim 27, whereineach of said electrode terminals comprises a conductive pad formed onthe top surface of said semiconductor substrate, and a metal bump bondedon said conductive pad.
 31. A semiconductor device as set forth in claim30, wherein said metal bump is formed as a stud-like metal bump.
 32. Asemiconductor device as set forth in claim 27, wherein said sealingresin layer contains a filler comprising a plurality of solid particles.33. A semiconductor device as set forth in claim 32, wherein said solidparticles are electrically conductive.
 34. A production processcomprising: preparing a semiconductor wafer having a plurality ofsemiconductor devices produced in a top surface thereof, each of saidsemiconductor devices having a plurality of electrode terminals providedand arranged on a top surface thereof; forming a sealing resin layer onthe top surface of said semiconductor wafer such that said electrodepads are completely covered with said sealing resin layer; and dicingsaid semiconductor wafer such that said semiconductor devices aredivided into a plurality of individually-separated semiconductordevices.
 35. A production process as set forth in claim 34, wherein saidsemiconductor wafer includes a protective layer formed on the topsurface thereof such that said electrode terminals are exposed to anoutside, with said protective layer being completely covered with saidsealing resin layer.
 36. A production process as set forth in claim 34,wherein each of said electrode terminals comprises a conductive padformed on the top surface of each of said semiconductor devices.
 37. Aproduction process as set forth in claim 34, wherein each of saidelectrode terminals comprises a conductive pad formed on the top surfaceof each of said semiconductor devices, and a metal bump bonded on saidconductive pad layer.
 38. A production process as set forth in claim 34,wherein the formation of said sealing resin layer comprises: putting anliquid resin material on the top surface of said semiconductor wafer;and spinning said semiconductor wafer such that said liquid resinmaterial is spread out over the top surface of said semiconductor wafer,resulting in the formation of said sealing resin layer.
 39. A productionprocess as set forth in claim 34, wherein the formation of said sealingresin layer comprises: preparing an adhesive resin sheet; and laminatingsaid adhesive resin sheet on the top surface of said semiconductorwafer, resulting in the formation of said sealing resin layer.
 40. Aproduction process as set forth in claim 39, wherein said adhesive sheethas a dicing resin sheet laminated on a surface thereof, and thelamination of said adhesive sheet on the top surface of saidsemiconductor wafer is performed by facing down and applying saidsemiconductor wafer to another surface of said adhesive sheet opposed tosaid dicing sheet thereof.
 41. A production process as set forth inclaim 34, further comprising: preparing a substrate having a pluralityof electrode terminals provided and arranged a top surface thereof, thearrangement of the electrode terminals of said substrate has a mirrorimage relationship with respect to the arrangement of the electrodeterminals of each of said individually-separated semiconductor devices;and mounting one of said individually-separated semiconductor devices onsaid substrate such that the electrode terminals of said substratepenetrate into the sealing resin layer of said individually-separatedsemiconductor device, and are bonded to said respective electrodeterminals thereof.
 42. A production process as set forth in claim 41,wherein each of the electrode terminals of said substrate comprises aconductive pad formed on the top surface thereof, and a sprout-likemetal bump bonded thereon, and each of the electrode terminals of saidindividually-separated semiconductor device comprises a conductive padformed on the top surface thereof.
 43. A production process as set forthin claim 42, wherein the mounting of said individually-separatedsemiconductor device on said substrate comprises: flipping over andpositioning said individually-separated semiconductor device above saidsubstrate such that the respective conductive pads of saidindividually-separated semiconductor device are aligned with thesprout-like bumps of said substrate; and pressing saidindividually-separated semiconductor device against said substrate,resulting in the penetration of the sprout-like bumps of said substrateinto said sealing resin layer and the bonding of the sprout-like bumpsof said substrate to the conductive pads of said individually-separatedsemiconductor device.
 44. A production process as set forth in claim 41,wherein each of the electrode terminals of said substrate comprises aconductive pad formed on the top surface thereof, and a stud-like metalbump bonded thereon, and each of the electrode terminals of saidindividually-separated semiconductor device comprises a conductive padformed on the top surface thereof, and a stud-like metal bump bondedthereon.
 45. A production process as set forth in claim 44, wherein themounting of said individually-separated semiconductor device on saidsubstrate comprises: flipping over and positioning saidindividually-separated semiconductor device above said substrate suchthat the respective stud-like metal bumps of said individually-separatedsemiconductor device are aligned with the stud-like metal bumps of saidsubstrate; and pressing said individually-separated semiconductor deviceagainst said substrate, resulting in the penetration of the stud-likebumps of said substrate into said sealing resin layer and the bonding ofthe stud-like bumps of said substrate to the stud-like bumps of saidindividually-separated semiconductor device.
 46. A production process asset forth in claim 45, wherein said sealing resin layer contains afiller comprising a plurality of solid particles, and a part of saidsolid particles is pinched and left in the bonding faces between thestud-like metal bumps of said individually-separated semiconductordevice and the stud-like metal bumps of said substrate.
 47. A productionprocess as set forth in claim 41, wherein said substrate comprisesanother semiconductor device, resulting in a production of achip-on-chip semiconductor device.
 48. A production process as set forthin claim 41, wherein said substrate comprises an electronic interposerfor producing an electronic product.
 49. A production process as setforth in claim 41, wherein said substrate comprises a wiring board forproducing a piece of electronic equipment.
 50. A production process asset forth in claim 34, wherein said semiconductor wafer is defined as afirst semiconductor wafer, said production process further comprising:preparing a second semiconductor wafer having a plurality ofsemiconductor devices produced in a top surface thereof, each of saidsemiconductor devices having a plurality of electrode terminals providedand arranged on a top surface thereof, the arrangement of the electrodeterminals of each of said semiconductor devices of said secondsemiconductor wafer has a mirror image relationship with respect to thearrangement of the electrode terminals of each of saidindividually-separated semiconductor devices; mounting said respectiveindividually-separated semiconductor devices on said semiconductordevices of said second semiconductor wafer such that the electrodeterminals of each of said semiconductor devices of said secondsemiconductor wafer penetrate into the sealing resin layer, and arebonded to respective electrode terminals of a correspondingindividually-separated semiconductor device, resulting in production ofa plurality of chip-on-chip semiconductor assemblies; and dicing saidsecond semiconductor wafer such that said chip-on-chip semiconductorassemblies are separated from each other.
 51. A semiconductor waferhaving a plurality of semiconductor devices produced therein, whichcomprises: a plurality of electrode terminals provided and arranged on atop surface of each of said semiconductor devices; and a sealing resinlayer formed on all the top surfaces of said semiconductor devices suchthat said electrode terminals are completely covered with said sealingresin layer.
 52. A production process comprising: preparing asemiconductor wafer having a plurality of semiconductor devices producedtherein, each of said semiconductor devices having plurality ofelectrode terminals provided and arranged on a top surface thereof;forming a sealing resin layer on said semiconductor wafer such that allthe electrode terminals are completely covered with said sealing resin.